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A 3D-printed miniature gas cell for photoacoustic spectroscopy of trace gases

机译:3D打印的微型气室,用于痕量气体的光声光谱

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摘要

A new methodology for the development of miniature photoacoustic trace gas sensors using 3D printing is presented. A near-infrared distributed feedback (DFB) laser is used together with a polymer based gas cell, off the shelf fiber optic collimators and a microelectromechanical system (MEMS) microphone to measure acetylene at 1532.83nm. The resonance behavior of the miniature gas cell is analyzed using a theoretical and experimental approach, with a measured resonance frequency of 15.25kHz and a Q-factor of 15. A minimum normalized noise equivalent absorption of 4.5·10-9Wcm-1Hz-1/2 is shown together with a 3σ detection limit of 750 parts per billion (ppb) for signal averaging times of 35seconds. The fiber coupled delivery and miniature cost-effective cell design allows for use in multi-point and remote detection applications.
机译:提出了一种使用3D打印技术开发微型光声痕量气体传感器的新方法。近红外分布式反馈(DFB)激光器与基于聚合物的气室,现成的光纤准直器和微机电系统(MEMS)麦克风一起使用,可在1532.83nm处测量乙炔。使用理论和实验方法分析了微型气室的共振行为,测得的共振频率为15.25kHz,Q因子为15。最小归一化噪声等效吸收为4.5·10-9Wcm-1Hz-1 /图2与35秒的信号平均时间的3σ检测极限(十亿分之750)一起显示。光纤耦合传输和微型经济高效的电池设计可用于多点和远程检测应用。

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